JPH0714362Y2 - 薄膜形成装置 - Google Patents

薄膜形成装置

Info

Publication number
JPH0714362Y2
JPH0714362Y2 JP1985115677U JP11567785U JPH0714362Y2 JP H0714362 Y2 JPH0714362 Y2 JP H0714362Y2 JP 1985115677 U JP1985115677 U JP 1985115677U JP 11567785 U JP11567785 U JP 11567785U JP H0714362 Y2 JPH0714362 Y2 JP H0714362Y2
Authority
JP
Japan
Prior art keywords
thin film
dispersion plate
substrate
film forming
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985115677U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6223856U (en]
Inventor
勇 森迫
洋一 伊野
清 星野
Original Assignee
日電アネルバ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日電アネルバ株式会社 filed Critical 日電アネルバ株式会社
Priority to JP1985115677U priority Critical patent/JPH0714362Y2/ja
Publication of JPS6223856U publication Critical patent/JPS6223856U/ja
Application granted granted Critical
Publication of JPH0714362Y2 publication Critical patent/JPH0714362Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP1985115677U 1985-07-27 1985-07-27 薄膜形成装置 Expired - Lifetime JPH0714362Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985115677U JPH0714362Y2 (ja) 1985-07-27 1985-07-27 薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985115677U JPH0714362Y2 (ja) 1985-07-27 1985-07-27 薄膜形成装置

Publications (2)

Publication Number Publication Date
JPS6223856U JPS6223856U (en]) 1987-02-13
JPH0714362Y2 true JPH0714362Y2 (ja) 1995-04-05

Family

ID=30999554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985115677U Expired - Lifetime JPH0714362Y2 (ja) 1985-07-27 1985-07-27 薄膜形成装置

Country Status (1)

Country Link
JP (1) JPH0714362Y2 (en])

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6014757Y2 (ja) * 1979-01-09 1985-05-10 日本電気株式会社 蒸着装置
JPS5934231B2 (ja) * 1980-12-19 1984-08-21 旭硝子株式会社 Ｃｖｄ装置の吐出装置
JPS6057507B2 (ja) * 1981-10-20 1985-12-16 日本重化学工業株式会社 超硬高純度窒化珪素の製造装置とその製造方法

Also Published As

Publication number Publication date
JPS6223856U (en]) 1987-02-13

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